Invention Grant
- Patent Title: FinFET having non-merging epitaxially grown source/drains
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Application No.: US15941074Application Date: 2018-03-30
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Publication No.: US10854615B2Publication Date: 2020-12-01
- Inventor: Chun Po Chang , Chen-Ming Lee , Fu-Kai Yang , Mei-Yun Wang , Wei-Yang Lee , Tzu-Hsiang Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/11 ; H01L29/66 ; H01L29/08 ; H01L29/78

Abstract:
A semiconductor device includes a layer having a semiconductive material. The layer includes an outwardly-protruding fin structure. An isolation structure is disposed over the layer but not over the fin structure. A first spacer and a second spacer are each disposed over the isolation structure and on sidewalls of the fin structure. The first spacer is disposed on a first sidewall of the fin structure. The second spacer is disposed on a second sidewall of the fin structure opposite the first sidewall. The second spacer is substantially taller than the first spacer. An epi-layer is grown on the fin structure. The epi-layer protrudes laterally. A lateral protrusion of the epi-layer is asymmetrical with respect to the first side and the second side.
Public/Granted literature
- US20190304984A1 FINFET HAVING NON-MERGING EPITAXIALLY GROWN SOURCE/DRAINS Public/Granted day:2019-10-03
Information query
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