Invention Grant
- Patent Title: Three-dimensional memory device and method for forming the same
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Application No.: US16402197Application Date: 2019-05-02
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Publication No.: US10854621B2Publication Date: 2020-12-01
- Inventor: Wenyu Hua , Fandong Liu , Zhiliang Xia
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11565 ; H01L27/11582

Abstract:
Embodiments of a three-dimensional (3D) memory device are provided. The 3D memory device includes a substrate, a memory stack with interleaved conductive layers and dielectric layers over the substrate, an array of channel structures each extending vertically through the memory stack, and a plurality of contact hole structures each extending vertically through the memory stack and electrically connected to a common source of one or more of the channel structures. At least one of the plurality of contact hole structures is surrounded by a plurality of the channel structures of nominally equal lateral distances to the respective contact hole structure.
Public/Granted literature
- US20200273872A1 THREE-DIMENSIONAL MEMORY DEVICE AND METHOD FOR FORMING THE SAME Public/Granted day:2020-08-27
Information query
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