Invention Grant
- Patent Title: Phase modulators based on ambipolar field-effect transistors
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Application No.: US16449597Application Date: 2019-06-24
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Publication No.: US10854740B2Publication Date: 2020-12-01
- Inventor: Nihar R. Pradhan , Stephen A. Mcgill
- Applicant: FLORIDA STATE UNIVERSITY RESEARCH FOUNDATION, INC.
- Applicant Address: US FL Tallahassee
- Assignee: FLORIDA STATE UNIVERSITY RESEARCH FOUNDATION, INC.
- Current Assignee: FLORIDA STATE UNIVERSITY RESEARCH FOUNDATION, INC.
- Current Assignee Address: US FL Tallahassee
- Agency: Fox Rothschild LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/76 ; H01L21/02 ; H01L29/24 ; H01L21/477 ; H01L29/66

Abstract:
Systems and methods for providing a phase modulator. The methods comprise creating a Field Effect Transistor (FET) by: placing a crystal structure displaying ambipolarity on a substrate comprising an oxide layer and a conductive silicon layer, the conductive silicon layer providing a gating electrical contact for the phase modulator, and forming source and drain electrical contacts on the crystal structure using e-beam lithography and an e-beam evaporator. The methods also comprising: annealing the FET to improve an interface between the crystal structure and the source and drain electrical contacts; and coating the FET with a dielectric layer to reduce or eliminate hysteresis so that a functionality of the phase modulator is improved.
Public/Granted literature
- US20200111900A1 PHASE MODULATORS BASED ON AMBIPOLAR FIELD-EFFECT TRANSISTORS Public/Granted day:2020-04-09
Information query
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