Invention Grant
- Patent Title: Ferroelectric ceramics, electronic component and manufacturing method of ferroelectric ceramics
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Application No.: US14886138Application Date: 2015-10-19
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Publication No.: US10854808B2Publication Date: 2020-12-01
- Inventor: Takeshi Kijima
- Applicant: Advanced Material Technologies, Inc.
- Applicant Address: JP Chiba
- Assignee: ADVANCED MATERIAL TECHNOLOGIES, INC.
- Current Assignee: ADVANCED MATERIAL TECHNOLOGIES, INC.
- Current Assignee Address: JP Chiba
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2014-216012 20141023
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H01L41/187 ; C23C14/08 ; H01L41/318 ; C23C14/56 ; C23C28/04 ; C23C14/02

Abstract:
Ferroelectric ceramics including: a Pb(Zr1-BTiB)O3 seed crystal film formed on a foundation film; and a Pb(Zr1-xTix)O3 crystal film, wherein: the seed crystal film is formed by sputtering while the foundation film is being disposed on an upper side of a sputtering target and the foundation film is being made to face the sputtering target; in the seed crystal film, a Zr/Ti ratio on the crystal film side from the center in the thickness direction thereof is larger than a Zr/Ti ratio on the foundation film side from the center in the thickness direction thereof; the crystal film is crystallized by coating and heating a solution containing, in an organic solvent, a metal compound wholly or partially containing ingredient metals of the crystal film and a partial polycondensation product thereof; and the B and the x satisfy formulae 2 and 3, respectively, below, 0.1
Public/Granted literature
- US20160118574A1 FERROELECTRIC CERAMICS, ELECTRONIC COMPONENT AND MANUFACTURING METHOD OF FERROELECTRIC CERAMICS Public/Granted day:2016-04-28
Information query
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