Invention Grant
- Patent Title: OCT system with bonded MEMS tunable mirror VCSEL swept source
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Application No.: US16129856Application Date: 2018-09-13
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Publication No.: US10855053B2Publication Date: 2020-12-01
- Inventor: Dale C. Flanders , Mark E. Kuznetsov , Walid A. Atia , Bartley C. Johnson
- Applicant: Axsun Technologies, Inc.
- Applicant Address: US MA Billerica
- Assignee: Axsun Technologies, Inc.
- Current Assignee: Axsun Technologies, Inc.
- Current Assignee Address: US MA Billerica
- Agency: HoustonHogle LLP
- Main IPC: H01S5/068
- IPC: H01S5/068 ; H01L33/00 ; G01B9/02 ; H01S5/06 ; H01S5/022 ; H01S5/024 ; H01S5/04 ; H01S5/183

Abstract:
A microelectromechanical systems (MEMS)-tunable vertical-cavity surface-emitting laser (VCSEL) in which the MEMS mirror is bonded to the active region. This allows for a separate electrostatic cavity that is outside the laser's optical resonant cavity. Moreover, the use of this cavity configuration allows the MEMS mirror to be tuned by pulling the mirror away from the active region. This reduces the risk of snap down. Moreover, since the MEMS mirror is now bonded to the active region, much wider latitude is available in the technologies that are used to fabricate the MEMS mirror. This is preferably deployed as a swept source in an optical coherence tomography (OCT) system.
Public/Granted literature
- US20190027895A1 OCT System with Bonded MEMS Tunable Mirror VCSEL Swept Source Public/Granted day:2019-01-24
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