Invention Grant
- Patent Title: Substrate support plate with improved lift pin sealing
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Application No.: US13798424Application Date: 2013-03-13
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Publication No.: US10857655B2Publication Date: 2020-12-08
- Inventor: Olkan Cuvalci , Gwo-Chuan Tzu , Xiaoxiong Yuan
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Main IPC: B25B11/00
- IPC: B25B11/00 ; H01L21/687

Abstract:
Embodiments of lift pin assemblies and substrate supports having such lift pin assemblies are provided herein. In some embodiments, a lift pin assembly includes a body with a first end including a flange and an opposing second end; a bore through the body from the first end to the second end; a profile on an outer surface proximate a second end; and a collar, wherein the profile is configured to removably lock the collar onto the second end.
Public/Granted literature
- US20140265097A1 SUBSTRATE SUPPORT PLATE WITH IMPROVED LIFT PIN SEALING Public/Granted day:2014-09-18
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