Invention Grant
- Patent Title: Surface treatment composition, preparation method thereof, surface treatment method using the same
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Application No.: US16132863Application Date: 2018-09-17
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Publication No.: US10858615B2Publication Date: 2020-12-08
- Inventor: Yukinobu Yoshizaki , Koichi Sakabe , Satoru Yarita , Kenichi Komoto
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu
- Agency: Foley & Lardner LLP
- Priority: JP2017-185299 20170926
- Main IPC: C11D7/50
- IPC: C11D7/50 ; C11D3/37 ; C11D11/00 ; C11D3/20 ; C11D7/26 ; H01L21/3105 ; H01L21/02
Abstract:
A surface treatment composition according to the present invention is used for treating a surface of a polished object to be polished which is obtained after polishing with a polishing composition including ceria, using the surface treatment composition including a (co)polymer having a monomer-derived structural unit having a carboxyl group or a salt group thereof, a residue removing accelerator composed of a specific compound having a hydroxyl group, and a dispersing medium, wherein pH is less than 7.
Public/Granted literature
- US20190093051A1 SURFACE TREATMENT COMPOSITION, PREPARATION METHOD THEREOF, SURFACE TREATMENT METHOD USING THE SAME Public/Granted day:2019-03-28
Information query
