An inflator of a vacuum atmosphere conversion chamber is provided. The inflator comprises a first charging pipe including a first valve body, a second charging pipe including a second valve body, a pressure monitoring and judging module, an oxygen concentration monitoring and judging module and a control module. The pressure monitoring and judging module is connected separately to the vacuum atmosphere conversion chamber and the control module, the oxygen concentration monitoring and judging module is connected separately to the vacuum atmosphere conversion chamber and the control module, and the control module is connected separately to the first valve body and the second valve body. An inflation method of vacuum atmosphere conversion chamber and a vacuum sputtering equipment are also provided. The inflator, the inflation method and the vacuum sputtering equipment can switch the charging gases, for eliminating the safety hazard on the basis of solving the oxidation issue effectively.