Pressure control device
Abstract:
A pressure control device includes a body having a groove-shaped flow path including a groove part and a widened part; a filter unit having a frame body including a through hole part that penetrates in a direction orthogonal to a central axis, a filter member in a planar plate shape disposed on one end side in a direction of an axis of the groove-shaped flow path with respect to the through hole part, and a seal member in a ring shape disposed along an outer-side circumferential edge part of the frame body when viewed from the through hole part; and a plate-shaped member being attached to the body to cover the groove-shaped flow path in a state where the filter unit is accommodated in the widened part. The frame body has a regulating part which regulates a disposition direction of the filter member with respect to the groove part.
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