• Patent Title: Method and instrument for measuring etch depth by differential polarimetric interferometry and glow discharge spectrometry apparatus comprising such a measuring instrument
  • Application No.: US16470061
    Application Date: 2017-12-14
  • Publication No.: US10859366B2
    Publication Date: 2020-12-08
  • Inventor: Simon Richard
  • Applicant: HORIBA FRANCE SAS
  • Applicant Address: FR Palaiseau
  • Assignee: HORIBA FRANCE SAS
  • Current Assignee: HORIBA FRANCE SAS
  • Current Assignee Address: FR Palaiseau
  • Agency: Nixon & Vanderhye
  • Priority: FR1662644 20161216
  • International Application: PCT/FR2017/053589 WO 20171214
  • International Announcement: WO2018/109410 WO 20180621
  • Main IPC: G01B9/02
  • IPC: G01B9/02 G01B11/22 H01L21/3065 H01L21/66
Method and instrument for measuring etch depth by differential polarimetric interferometry and glow discharge spectrometry apparatus comprising such a measuring instrument
Abstract:
Disclosed is a method for measuring etch depth including the following steps: splitting a light beam into a first, and respectively second, incident beam directed towards a first, respectively second, area of a sample exposed to an etching treatment to form a first, and respectively second, reflected beam, recombining the first reflected beam and the second reflected beam to form an interferometric beam; detecting a first, and respectively second, interferometric intensity signal relative to a first, respectively second, polarisation component; calculating a lower envelope function and an upper envelope function of a differential polarimetric interferometry signal; determining an offset function and a normalisation function from the first lower envelope function and the first upper envelope function; and calculating a differential polarimetric interferometry function normalised locally at each time instant.
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