Invention Grant
- Patent Title: MEMS capacitive shear sensor system having an interface circuit
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Application No.: US15550466Application Date: 2016-02-11
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Publication No.: US10859448B2Publication Date: 2020-12-08
- Inventor: Casey A. Barnard , Jessica C. Meloy , Mark Sheplak
- Applicant: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee Address: US FL Gainesville
- Agency: Alston & Bird LLP
- International Application: PCT/US2016/017489 WO 20160211
- International Announcement: WO2016/130766 WO 20160818
- Main IPC: G01L1/14
- IPC: G01L1/14 ; G01N11/02 ; B81B7/00 ; G01N11/00 ; H01L23/00 ; H05K1/18

Abstract:
A sensor system comprising a Micro-Electro-Mechanical Systems (MEMS)-based capacitive floating element shear stress sensor, the associated packaging, and the interface circuitry required for operation as an instrumentation-grade sensing system is disclosed herein. One implementation of the interface circuitry is an analog synchronous modulation/demodulation scheme enabling time-resolved measurements of both mean and dynamic wall shear stress events, where a modulation section couples to the sensor for sensing wall shear stress at the surface of an object in a fluid and generates at least one bias signal from the sensor output signal. In response to the bias signal, a demodulation control circuit adjusts the phase of the bias signal and generates a demodulation control signal from the phase adjusted signal. Consequently, in response to the demodulation control signal, a demodulation section synchronizes the rectification of the sensor output signal, while the phase information is maintained.
Public/Granted literature
- US20180038746A1 MEMS CAPACITIVE SHEAR SENSOR SYSTEM HAVING AN INTERFACE CIRCUIT Public/Granted day:2018-02-08
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