Invention Grant
- Patent Title: Pellicle frame and pellicle
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Application No.: US16127599Application Date: 2018-09-11
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Publication No.: US10859909B2Publication Date: 2020-12-08
- Inventor: Yu Yanase
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2017-197004 20171010
- Main IPC: G03F1/64
- IPC: G03F1/64
Abstract:
The present invention is to provide a pellicle frame characterized by including a metal or alloy having a linear expansion coefficient of 10×10−6 (1/K) or less and further a density of 4.6 g/cm3 or less, and a pellicle characterized by including the pellicle frame as an element.
Public/Granted literature
- US20190107774A1 PELLICLE FRAME AND PELLICLE Public/Granted day:2019-04-11
Information query
