Invention Grant
- Patent Title: Photoresist stripper composition for manufacturing liquid crystal display
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Application No.: US15751967Application Date: 2016-08-10
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Publication No.: US10859917B2Publication Date: 2020-12-08
- Inventor: Ho-Sung Choi , Kwang-Hyun Ryu , Jong-Il Bae , Jong-Soon Lee , Sang-Ku Ha , Hye-Sung Yang , Mi-Yeon Han , Hyo-Jin Lee
- Applicant: LTC Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: LTC CO., LTD.
- Current Assignee: LTC CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: KR10-2015-0114310 20150813
- International Application: PCT/KR2016/008810 WO 20160810
- International Announcement: WO2017/026803 WO 20170216
- Main IPC: G03F7/42
- IPC: G03F7/42 ; C11D7/32 ; C11D3/00 ; C11D11/00 ; C11D7/50 ; C11D7/26 ; H01L21/311 ; C11D3/20 ; G03F7/32 ; H01L21/027 ; H01L27/12

Abstract:
The present disclosure relates to a photoresist stripper composition for manufacturing an LCD, and relates to an integrated photoresist stripper composition capable of being used in all processes for manufacturing a TFT-LCD. More specifically, the present disclosure relates to an aqueous photoresist stripper composition capable of being used in all of transition metal, potential metal and oxide semiconductor wires. The aqueous photoresist stripper composition includes (a) a potential metal and metal oxide corrosion inhibitor, (b) a transition metal corrosion inhibitor, (c) a primary alkanolamine, (d) a cyclic alcohol, (e) water, (f) an aprotic polar organic solvent, and (g) a protic polar organic solvent, and has an excellent ability to remove a degenerated photoresist produced after progressing a hard baked process, an implant process and a dry etch process in a semiconductor or flat display panel process, may be used in aluminum that is a potential metal, copper or silver that is a transition metal, and metal oxide wires at the same time, and may be introduced to organic film and COA processes.
Public/Granted literature
- US20180239256A1 Photoresist Stripper Composition for Manufacturing Liquid Crystal Display Public/Granted day:2018-08-23
Information query
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