Invention Grant
- Patent Title: Position detection device, position detection method, imprint apparatus, and method for manufacturing article
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Application No.: US16280974Application Date: 2019-02-20
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Publication No.: US10859929B2Publication Date: 2020-12-08
- Inventor: Satoshi Iino , Hiroshi Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2018-044355 20180312
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03F7/00

Abstract:
A position detection device for adjusting positions of a mold and a substrate using a mold mark formed on the mold and a substrate mark formed on the substrate includes a detection unit configured to detect light from the mold mark and the substrate mark, and a processing unit configured to obtain a positional relationship between the substrate and the mold based on a detection result of the detection unit, wherein the processing unit obtains the positional relationship between the substrate and the mold based on a corrected signal obtained by removing a noise component based on the light from the mold mark from a detected signal based on the light from the mold mark and the substrate mark.
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