Inspection system and method for correcting image for inspection
Abstract:
An inspection system includes a first imaging device provided in a first inspection device; a second imaging device provided in a second inspection device; a first controller; and a second controller, wherein the first controller acquires a particular feature of a calibration jig, which is positioned in the first inspection device, from an image of the calibration jig obtained by the first imaging device as first feature data, and the second controller acquires the particular feature of the calibration jig, which is positioned in the second inspection device, from an image of the calibration jig obtained by the second imaging device as second feature data. The correction amount needed for correcting the image obtained by the second imaging device so that the second feature data matches the first feature data is acquired, and the second inspection device corrects an image of an inspection subject using this correction amount.
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