Invention Grant
- Patent Title: Segmented vertical wafer boat
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Application No.: US15920437Application Date: 2018-03-13
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Publication No.: US10861727B2Publication Date: 2020-12-08
- Inventor: Larry E. Vaughan
- Applicant: Samsung Electronics Co., Ltd.
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Agency: Renaissance IP Law Group LLP
- Main IPC: B25B11/00
- IPC: B25B11/00 ; H01L21/673 ; C23C16/458 ; C23C16/34 ; H01L21/67

Abstract:
A vertical wafer boat has an upper boat segment and a lower boat segment, with the upper boat segment configured to removably mount on the lower boat segment, and to receive one or more semiconductor substrates. The lower boat segment includes a top plate, a first set of adiabatic plates, and a second set of adiabatic plates. One or more posts connect the top plate, the first set of adiabatic plates, and the second set of adiabatic plates. The first set of adiabatic plates include a first set of gaps separating a first plurality of sections; the second set of adiabatic plates include a second set of gaps separating a second plurality of sections; and the first set of adiabatic plates and the second set of adiabatic plates are interleaved.
Public/Granted literature
- US20190287832A1 SEGMENTED VERTICAL WAFER BOAT Public/Granted day:2019-09-19
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