Invention Grant
- Patent Title: Vacuum adsorption unit and vacuum adsorption carrier
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Application No.: US15730756Application Date: 2017-10-12
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Publication No.: US10861728B2Publication Date: 2020-12-08
- Inventor: Hanbo Zheng , Li Li , Junwei Yan , Changhai Feng
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Calfee, Halter & Griswold LLP
- Priority: CN201710113401 20170228
- Main IPC: B25B11/00
- IPC: B25B11/00 ; H01L21/673

Abstract:
The present disclosure discloses a vacuum adsorption unit and a vacuum adsorption carrier, wherein the vacuum adsorption unit comprises: a housing defining an air path through-hole therein, the air path through-hole provided with an upper abutting surface and a lower abutting surface; a piston movable provided in the air path through-hole and is located between the upper abutting surface and the lower abutting surface; an outer peripheral wall of the piston is slidably matched with an inner peripheral wall of the air path through-hole; an elastic member having both ends that respectively abut against the housing and the piston, to constantly drive the piston to abut on the upper abutting surface; and a pressure relief passage communicated with the air path through-hole, and is configured to be closed only when the piston moves to abut against the lower abutting surface.
Public/Granted literature
- US20180247848A1 VACUUM ADSORPTION UNIT AND VACUUM ADSORPTION CARRIER Public/Granted day:2018-08-30
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