A method of making a temperature sensor arrangement includes forming a sensor array. The sensor array includes a first transistor of a first device and a plurality of second transistors of a second device different from the first device. The method further includes forming a guard ring region between the sensor array and another circuit of an integrated circuit. The guard ring region includes a transistor structure. The method further includes forming a thermally conductive element between the sensor array and the guard ring region. The thermally conductive element is connected to the transistor structure, the first transistor and each of the plurality of second transistors.