Invention Grant
- Patent Title: Semiconductor arrangement and method for manufacturing the same
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Application No.: US15723928Application Date: 2017-10-03
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Publication No.: US10861748B2Publication Date: 2020-12-08
- Inventor: Huilong Zhu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Christensen, Fonder, Dardi & Herbert PLLC
- Priority: CN201310627406 20131128
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/66 ; H01L29/78 ; H01L21/265 ; H01L21/761 ; H01L21/762 ; H01L21/8234 ; H01L21/8238

Abstract:
Provided are a semiconductor arrangement and a method for manufacturing the same. An example arrangement may comprise: a bulk semiconductor substrate; a fin formed on the substrate; a first FinFET and a second FinFET formed on the substrate, wherein the first FinFET comprises a first gate stack intersecting the fin and a first gate spacer disposed on sidewalls of the first gate stack, the second FinFET comprises a second gate stack intersecting the fin and a second gate spacer disposed on sidewalls of the second gate stack; a dummy gate spacer formed between the first FinFET and the second FinFET and intersecting the fin; a first isolation section self-aligned to a space defined by the dummy gate spacer, wherein the isolation section electrically isolates the first FinFET from the second FinFET; and a second isolation layer disposed under a bottom surface of the first isolation section.
Public/Granted literature
- US20180033699A1 SEMICONDUCTOR ARRANGEMENT AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2018-02-01
Information query
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