Invention Grant
- Patent Title: Packaging method and package structure of wafer-level system-in-package
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Application No.: US16206037Application Date: 2018-11-30
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Publication No.: US10861821B2Publication Date: 2020-12-08
- Inventor: Mengbin Liu , Hailong Luo
- Applicant: Ningbo Semiconductor International Corporation
- Applicant Address: CN Ningbo
- Assignee: Ningbo Semiconductor International Corporation
- Current Assignee: Ningbo Semiconductor International Corporation
- Current Assignee Address: CN Ningbo
- Agency: Anova Law Group, PLLC
- Priority: CN201810416799 20180503
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L21/768 ; H01L23/00 ; H01L25/00 ; H01L23/48 ; H01L21/56

Abstract:
A wafer-level system-in-package (WLSiP) packaging method and a WLSiP package structure are provided. The method includes providing a device wafer including a first front surface and a first back surface and providing a plurality of second chips. The method also includes forming an adhesive layer on the first front surface and patterning the adhesive layer to form a plurality of first through-holes. In addition, the method includes bonding the plurality of second chips with a remaining adhesive layer to cover the plurality of first through-holes. Moreover, the method includes forming a plurality of second through-holes, which are connected with the plurality of first through-holes to form a plurality of first conductive through-holes, each first conductive through-hole includes a second through-hole and a first through-hole. Further, the method includes forming a first conductive plug in a first conductive through-hole to electrically connect to one of the plurality of second chips.
Public/Granted literature
- US20190341365A1 PACKAGING METHOD AND PACKAGE STRUCTURE OF WAFER-LEVEL SYSTEM-IN-PACKAGE Public/Granted day:2019-11-07
Information query
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