Invention Grant
- Patent Title: Sensor system
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Application No.: US16609554Application Date: 2017-12-26
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Publication No.: US10861829B2Publication Date: 2020-12-08
- Inventor: Tracy Helen Fung , Hai Quang Tran
- Applicant: ILLUMINA, INC.
- Applicant Address: US CA San Diego
- Assignee: ILLUMINA, INC.
- Current Assignee: ILLUMINA, INC.
- Current Assignee Address: US CA San Diego
- Agency: Illumina, Inc.
- International Application: PCT/US2017/068397 WO 20171226
- International Announcement: WO2019/132857 WO 20190704
- Main IPC: G01N21/64
- IPC: G01N21/64 ; H01L25/065 ; H01L23/31 ; H01L23/00

Abstract:
A system includes an image sensor structure and a flow cell. The image sensor structure includes an image layer disposed over a base substrate. A device stack is disposed over the image layer. A bond pad is disposed in the device stack. A passivation stack is disposed over the device stack and the bond pad. An array of nanowells is disposed in a top layer of the passivation stack. A through-silicon via (TSV) is in electrical contact with the bond pad. The TSV extends through the base substrate. A redistribution layer (RDL) is disposed on a bottom surface of the base substrate. The RDL is in electrical contact with the TSV. The flow cell is disposed upon the top layer of the passivation stack to form a flow channel therebetween. The flow channel is disposed over the array of nanowells and the bond pad.
Public/Granted literature
- US20200066684A1 SENSOR SYSTEM Public/Granted day:2020-02-27
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