Invention Grant
- Patent Title: Static random-access memory with capacitor which has finger-shaped protrudent portions and related fabrication method
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Application No.: US16395215Application Date: 2019-04-25
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Publication No.: US10861858B2Publication Date: 2020-12-08
- Inventor: Shih-Ping Lee , Yu-Cheng Lu , Kuo-Fang Huang , Chia-Hsien Kuo
- Applicant: Powerchip Technology Corporation
- Applicant Address: TW Hsinchu
- Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee Address: TW Hsinchu
- Agent Winston Hsu
- Priority: TW108100321A 20190104
- Main IPC: H01L27/11
- IPC: H01L27/11 ; G11C11/412 ; H01L27/092 ; H01L49/02 ; H01L21/768 ; H01L21/3105

Abstract:
A static random-access memory structure includes a substrate, a first conductive type transistor, a second conductive type transistor and a capacitor unit. The first conductive type transistor and the second conductive type transistor are disposed on the surface of the substrate, and the capacitor unit is positioned between the transistors. The capacitor unit includes a first electrode, a second electrode, and a dielectric layer disposed between the first electrode and the second electrode. The first electrode includes a plurality of first protrudent portions and a planar portion. The first protrudent portions are connected to the first planar portion and protrude from the top surface of the planar portion. The second electrode covers the top surface of the first protrudent portions and formed between adjacent first protrudent portions.
Public/Granted literature
- US20200219891A1 STATIC RANDOM-ACCESS MEMORY STRUCTURE AND RELATED FABRICATION METHOD Public/Granted day:2020-07-09
Information query
IPC分类: