Invention Grant
- Patent Title: Three-dimensional memory device and method for forming the same
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Application No.: US16402202Application Date: 2019-05-02
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Publication No.: US10861872B2Publication Date: 2020-12-08
- Inventor: Wenyu Hua , Fandong Liu , Zhiliang Xia
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/535 ; H01L29/08 ; H01L29/10

Abstract:
Three-dimensional (3D) memory devices and methods for forming the 3D memory devices are provided. In one example, a 3D memory device includes a substrate, a memory stack including interleaved conductive layers and dielectric layers on the substrate, and a staircase structure on one side of the memory stack. The 3D memory device also includes a staircase contact in the staircase structure and a plurality of dummy source structures each extending vertically through the staircase structure. The plurality of dummy source structures surround the staircase contact.
Public/Granted literature
- US20200273873A1 THREE-DIMENSIONAL MEMORY DEVICE AND METHOD FOR FORMING THE SAME Public/Granted day:2020-08-27
Information query
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