Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16751293Application Date: 2020-01-24
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Publication No.: US10861875B2Publication Date: 2020-12-08
- Inventor: Go Oike , Tsuyoshi Sugisaki
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2018-046940 20180314
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L27/11582 ; H01L27/1157 ; H01L27/11556 ; H01L27/11524 ; G11C5/06 ; H01L27/11565 ; G11C16/08 ; H01L27/11519 ; H01L29/792

Abstract:
According to one embodiment, a semiconductor memory device includes a plurality of first interconnect layers, first and second memory pillars, and a plurality of first plugs. The plurality of first interconnect layers include a first array region where the first memory pillar penetrates the plurality of first interconnect layers, a second array region where the second memory pillar penetrates the plurality of first interconnect layers, and a coupling region where a plurality of coupling parts respectively coupled to the plurality of first plugs are formed. Along a first direction parallel to the semiconductor substrate, the first array region, the coupling region, and the second array region are arranged in order.
Public/Granted literature
- US20200161333A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-05-21
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