Invention Grant
- Patent Title: Light absorption apparatus
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Application No.: US16023493Application Date: 2018-06-29
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Publication No.: US10861884B2Publication Date: 2020-12-08
- Inventor: Szu-Lin Cheng , Shu-Lu Chen
- Applicant: Artilux, Inc.
- Applicant Address: TW Zhubei
- Assignee: ARTILUX, INC.
- Current Assignee: ARTILUX, INC.
- Current Assignee Address: TW Zhubei
- Agency: Perkins Coie LLP
- Agent Han-Wei Chen
- Main IPC: H01L27/144
- IPC: H01L27/144 ; H01L31/18 ; H01L31/0216 ; H01L31/0224 ; H01L31/109 ; H01L31/028 ; H01L29/06 ; H01L31/0232 ; H01L31/105 ; H01L31/036 ; H02S40/44

Abstract:
A light absorption apparatus includes a substrate, a light absorption layer above the substrate on a first selected area, a silicon layer above the light absorption layer, a spacer surrounding at least part of the sidewall of the light absorption layer, an isolation layer surrounding at least part of the spacer, wherein the light absorption apparatus can achieve high bandwidth and low dark current.
Public/Granted literature
- US20180308882A1 LIGHT ABSORPTION APPARATUS Public/Granted day:2018-10-25
Information query
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