Invention Grant
- Patent Title: Field plate structure for high voltage device
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Application No.: US16417735Application Date: 2019-05-21
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Publication No.: US10861946B1Publication Date: 2020-12-08
- Inventor: Chia-Cheng Ho , Hui-Ting Lu , Pei-Lun Wang , Yu-Chang Jong , Jyun-Guan Jhou
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L27/092 ; H01L29/78 ; H01L29/49 ; H01L29/66 ; H01L21/28 ; H01L21/765 ; H01L21/8238

Abstract:
Various embodiments of the present disclosure are directed towards an integrated chip including a field plate disposed over a drift region. A first gate electrode overlies a substrate between a source region and a drain region. An etch stop layer laterally extends from an outer sidewall of the first gate electrode to the drain region. The etch stop layer overlies the drift region disposed between the source region and the drain region. A field plate is disposed within a first inter-level dielectric (ILD) layer overlying the substrate. The field plate overlies the drift region. A top surface of the field plate is aligned with a top surface of the first gate electrode and a bottom surface of the field plate is vertically above a bottom surface of the first gate electrode. The field plate and first gate electrode respectively include metal materials.
Public/Granted literature
- US20200373395A1 FIELD PLATE STRUCTURE FOR HIGH VOLTAGE DEVICE Public/Granted day:2020-11-26
Information query
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