Invention Grant
- Patent Title: Fabrication methods of insulated gate bipolar transistors
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Application No.: US16680653Application Date: 2019-11-12
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Publication No.: US10861955B2Publication Date: 2020-12-08
- Inventor: Lei Bing Yuan
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201710073772 20170210
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H02M7/219 ; H01L29/739 ; H01L29/40 ; H01L29/06

Abstract:
Method for fabricating an insulated gate bipolar transistor (IGBT) is provided. A substrate includes a device region, that includes control regions and turn-off regions, arranged alternately. A drift region is formed in the substrate. A well region is formed in a portion of the substrate in the control regions and the turn-off regions, and first gate structures are formed in the control regions. The well region is in contact with the drift region, and the first gate structures are in contact with both the drift region and the well region. Emission regions are formed in the well region of the control regions and in the substrate on one or both sides of each first gate structure, the drift region and each emission region are separated by the well region, and the emission regions are electrically connected to a portion of the well region in the turn-off region.
Public/Granted literature
- US20200083348A1 FABRICATION METHODS OF INSULATED GATE BIPOLAR TRANSISTORS Public/Granted day:2020-03-12
Information query
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