Doping profile for strained source/drain region
Abstract:
The present disclosure relates to a transistor device having a strained source/drain region. In some embodiments, the transistor device has a gate structure arranged over a semiconductor substrate. The transistor device also has a strained source/drain region arranged within the semiconductor substrate along a side of the gate structure. The strained source/drain region includes a first layer and a second layer over the first layer. The first layer has a strain inducing component with a first concentration profile that decreases as a distance from the second layer decreases, and the second layer has the strain inducing component with a second non-zero concentration profile that is discontinuous with the first concentration profile.
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