Invention Grant
- Patent Title: Doping profile for strained source/drain region
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Application No.: US15589259Application Date: 2017-05-08
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Publication No.: US10861971B2Publication Date: 2020-12-08
- Inventor: Hsueh-Chang Sung , Tsz-Mei Kwok , Kun-Mu Li , Tze-Liang Lee , Chii-Horng Li
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/66 ; H01L29/08 ; H01L29/78 ; H01L21/84 ; H01L21/02 ; H01L21/324 ; H01L29/04 ; H01L29/165

Abstract:
The present disclosure relates to a transistor device having a strained source/drain region. In some embodiments, the transistor device has a gate structure arranged over a semiconductor substrate. The transistor device also has a strained source/drain region arranged within the semiconductor substrate along a side of the gate structure. The strained source/drain region includes a first layer and a second layer over the first layer. The first layer has a strain inducing component with a first concentration profile that decreases as a distance from the second layer decreases, and the second layer has the strain inducing component with a second non-zero concentration profile that is discontinuous with the first concentration profile.
Public/Granted literature
- US20170243975A1 DOPING PROFILE FOR STRAINED SOURCE/DRAIN REGION Public/Granted day:2017-08-24
Information query
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