Invention Grant
- Patent Title: Method for manufacturing selective emitter using surface structure and solar cell including selective emitter using surface structure
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Application No.: US16563118Application Date: 2019-09-06
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Publication No.: US10861987B2Publication Date: 2020-12-08
- Inventor: Junsin Yi , Minkyu Ju , Young-Hyun Cho , Eun-Chel Cho , Youngkuk Kim , Kumar Mallem
- Applicant: Research & Business Foundation Sungkyunkwan University
- Applicant Address: KR Suwon-si
- Assignee: Research & Business Foundation Sungkyunkwan University
- Current Assignee: Research & Business Foundation Sungkyunkwan University
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2018-0130398 20181030
- Main IPC: H01L31/0236
- IPC: H01L31/0236 ; H01L31/18 ; H01L31/068 ; H01L31/0224 ; H01L31/042

Abstract:
Proposed is a method for manufacturing a selective emitter using a surface structure, the method includes: preparing a wafer; forming fine first surface unevenness in each of front and rear faces of the wafer; forming a texturing-inhibiting film on each of the front and rear faces of the wafer; partially patterning the front texturing-inhibiting film to expose a portion of the front face of the wafer; forming second surface unevenness in the exposed portion of the wafer, wherein the second surface unevenness has a roughness greater and deeper than a roughness of the first surface unevenness; removing the texturing-inhibiting films; and forming a selective emitter on a surface of the wafer having the first surface unevenness and the second surface unevenness defined therein using a doping process.
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Information query
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