- Patent Title: Method to effectively suppress heat dissipation in PCRAM devices
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Application No.: US16289733Application Date: 2019-03-01
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Publication No.: US10862031B2Publication Date: 2020-12-08
- Inventor: Yu Chao Lin , Jui-Ming Chen , Shao-Ming Yu , Tung Ying Lee , Yu-Sheng Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
In some embodiments, the present disclosure relates to an integrated chip including a phase change material disposed over a bottom electrode and configured to change from a crystalline structure to an amorphous structure upon temperature changes. A top electrode is disposed over an upper surface of the phase change material. A via electrically contacts a top surface of the top electrode. Further, a maximum width of the upper surface of the phase change material is less than a maximum width of a bottom surface of the phase change material.
Public/Granted literature
- US20200279998A1 NOVEL METHOD TO EFFECTIVELY SUPPRESS HEAT DISSIPATION IN PCRAM DEVICES Public/Granted day:2020-09-03
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