Invention Grant
- Patent Title: Electronic device and method for fabricating the same
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Application No.: US16777608Application Date: 2020-01-30
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Publication No.: US10862033B2Publication Date: 2020-12-08
- Inventor: Kyoung Su Choi
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2017-0169415 20171211
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; G11C7/18 ; G11C8/14 ; H01L27/22

Abstract:
An electronic device includes a semiconductor memory, wherein the semiconductor memory comprises a plurality of memory stacks neighboring each other in a first direction and a second direction, the second direction intersecting the first direction, a plurality of first liner layers covering sidewalls of memory stacks that neighbor each other in the second direction, the plurality of first liner layers extending in the second direction, a plurality of first air gaps located in spaces covered by the first liner layers, and a plurality of second air gaps located between each pair of memory stacks that neighbor each other in the first direction, the plurality of second air gaps extending in the second direction.
Public/Granted literature
- US20200168795A1 ELECTRONIC DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2020-05-28
Information query
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