Invention Grant
- Patent Title: Elastic wave device
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Application No.: US15834206Application Date: 2017-12-07
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Publication No.: US10862455B2Publication Date: 2020-12-08
- Inventor: Tsutomu Takai , Atsushi Tanaka , Seiji Kai
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2015-142974 20150717
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/25 ; H03H9/05 ; H03H9/145 ; H01L41/047 ; H03H9/64

Abstract:
An elastic wave device includes a piezoelectric thin film provided on a low acoustic velocity film and an IDT electrode provided on the piezoelectric thin film, wherein the piezoelectric thin film is made of a piezoelectric single crystal and includes a first principal surface that is a positive surface in a polarization axis direction and a second principal surface that is a negative surface in the polarization axis direction. The first principal surface of the piezoelectric thin film faces the low acoustic velocity film, and the second principal surface faces the IDT electrode.
Public/Granted literature
- US20180102761A1 ELASTIC WAVE DEVICE Public/Granted day:2018-04-12
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