Invention Grant
- Patent Title: Method of producing a NTCR sensor
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Application No.: US16615438Application Date: 2018-05-03
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Publication No.: US10883179B2Publication Date: 2021-01-05
- Inventor: Jaroslaw Kita , Ralf Moos , Christian Münch , Véronique Poulain , Michaela Schubert , Sophie Schuurman
- Applicant: VISHAY ELECTRONIC GMBH
- Applicant Address: DE Selb
- Assignee: VISHAY ELECTRONIC GMBH
- Current Assignee: VISHAY ELECTRONIC GMBH
- Current Assignee Address: DE Selb
- Agency: Volpe Koenig
- Priority: EP17172267 20170522
- International Application: PCT/EP2018/061439 WO 20180503
- International Announcement: WO2018/215187 WO 20181129
- Main IPC: H01C7/04
- IPC: H01C7/04 ; C23C4/12 ; C23C24/08

Abstract:
The present invention relates to a method of producing a negative temperature coefficient resistor (NTCR) sensor, the method comprising the steps of: providing a mixture comprising uncalcined powder and a carrier gas in an aerosol-producing unit, with the uncalcined powder comprising metal oxide components; forming an aerosol from said mixture and said carrier gas and accelerating said aerosol in a vacuum towards a substrate arranged in a deposition chamber; forming a film of the uncalcined powder of said mixture on said substrate; and transforming the film into a layer of spinel-based material by applying a heat treatment step.
Public/Granted literature
- US20200173031A1 METHOD OF PRODUCING A NTCR SENSOR Public/Granted day:2020-06-04
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