Invention Grant
- Patent Title: Piezoelectric rotational MEMS resonator
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Application No.: US15988670Application Date: 2018-05-24
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Publication No.: US10884018B2Publication Date: 2021-01-05
- Inventor: Heikki Kuisma
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20175469 20170524
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; G01C19/5747 ; G01C19/5769 ; G01C19/5642 ; G01P15/09 ; H01L41/09 ; H03H9/02 ; H03H9/24

Abstract:
This disclosure reveals a resonator where at least one suspended inertial mass is driven into rotational oscillation by a piezoelectric drive transducer, or where the rotational motion of at least one suspended inertial mass is sensed by a piezoelectric sense transducer. The disclosure is based on the idea of attaching suspenders to the inertial mass with at least one flexure, which allows the end of the suspender which is attached to the inertial mass to rotate in relation to the inertial mass at this attachment point when the inertial mass is in motion. The resonator may be employed in a resonator system, a clock oscillator or a gyroscope.
Public/Granted literature
- US20180340955A1 PIEZOELECTRIC ROTATIONAL MEMS RESONATOR Public/Granted day:2018-11-29
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