Invention Grant
- Patent Title: Method for the collective production of a plurality of optoelectronic chips
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Application No.: US16349173Application Date: 2017-11-10
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Publication No.: US10884187B2Publication Date: 2021-01-05
- Inventor: Sylvie Menezo , Frank Fournel
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1660967 20161114
- International Application: PCT/FR2017/053067 WO 20171110
- International Announcement: WO2018/087485 WO 20180517
- Main IPC: G02B6/136
- IPC: G02B6/136 ; G02B6/12 ; G02B6/42

Abstract:
A method is provided for producing, on a wafer-scale, a plurality of optoelectronic chips, including: providing a receiver substrate including a plurality of elementary zones, each being configured to contain one optoelectronic chip, and each including at least one coupling waveguide integrated into the receiver substrate and configured to be optically coupled to a first optoelectronic component; transferring a plurality of pads to the elementary zones such that the pads partially cover the at least one coupling waveguide; and producing the first optoelectronic component from the pads such that each first optoelectronic component is facing the at least one coupling waveguide of a corresponding elementary zone, and, following the transferring step, each pad of the plurality of pads extends over a set of at least two adjacent elementary zones, so as to partially cover the at least one coupling waveguide of each of the adjacent elementary zones.
Public/Granted literature
- US20190265413A1 METHOD FOR THE COLLECTIVE PRODUCTION OF A PLURALITY OF OPTOELECTRONIC CHIPS Public/Granted day:2019-08-29
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