Invention Grant
- Patent Title: Optical device, projection optical system, exposure apparatus using the same, and method for manufacturing article
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Application No.: US16033104Application Date: 2018-07-11
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Publication No.: US10884236B2Publication Date: 2021-01-05
- Inventor: Choshoku Sai
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2017-149540 20170801
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B27/00 ; G03B21/28 ; G02B27/09 ; G03F7/20
Abstract:
An optical device includes a mirror, and a plurality of actuators configured to deform a shape of a reflecting surface of the mirror. At least some of the plurality of actuators are arranged on a plurality of concentric circles arranged in such a manner that the concentric circles are arranged denser as positions of the concentric circles are located farther from a center of the reflecting surface of the mirror, and at least some of the plurality of actuators are arranged at equal intervals in circumferential directions of the concentric circles.
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