Invention Grant
- Patent Title: Method and system for nanoscale data recording
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Application No.: US16995191Application Date: 2020-08-17
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Publication No.: US10884340B2Publication Date: 2021-01-05
- Inventor: Franklin Mark Schellenberg , Keith Edward Bennett
- Applicant: Franklin Mark Schellenberg , Keith Edward Bennett
- Applicant Address: US CA Palo Alto; US CA Palo Alto
- Assignee: Franklin Mark Schellenberg,Keith Edward Bennett
- Current Assignee: Franklin Mark Schellenberg,Keith Edward Bennett
- Current Assignee Address: US CA Palo Alto; US CA Palo Alto
- Agent Franklin M. Schellenberg
- Main IPC: G03F7/20
- IPC: G03F7/20 ; B82Y10/00 ; G02B6/04 ; G02B6/10 ; G11B7/00

Abstract:
A super-resolution system for nano-patterning is disclosed, comprising an exposure head that enables a super-resolution patterning exposures. The super-resolution exposures are carried out using electromagnetic radiation and plasmonic structures, and in some embodiments, plasmonic structures having specially designed super-resolution apertures, of which the “bow-tie” and “C-aperture” are examples. These apertures create small but bright images in the near-field transmission pattern. A writing head comprising one or more of these apertures is held in close proximity to a medium for patterning. In some embodiments, a data processing system is provided to re-interpret the data to be patterned into a set of modulation signals used to drive the multiple individual channels and multiple exposures, and a detection means is provided to verify the data as written.
Public/Granted literature
- US20200379356A1 METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING Public/Granted day:2020-12-03
Information query
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