Invention Grant
- Patent Title: Flow rate signal correction method and flow rate control device employing same
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Application No.: US15771148Application Date: 2016-10-24
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Publication No.: US10884436B2Publication Date: 2021-01-05
- Inventor: Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Masahiko Takimoto , Masayoshi Kawashima , Takahiro Imai
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Studebaker & Brackett PC
- Priority: JP2015-211800 20151028
- International Application: PCT/JP2016/004662 WO 20161024
- International Announcement: WO2017/073038 WO 20170504
- Main IPC: G05D7/06
- IPC: G05D7/06 ; G01F15/00 ; G01F1/36

Abstract:
A flow rate signal correction method applicable to a pressure-type flow rate control device that controls a flow rate by controlling pressure existing upstream of a restriction part includes a step of generating a primary signal indicating the flow rate in accordance with an output of a pressure sensor provided upstream of the restriction part and a step of generating a secondary signal as a corrected signal of the primary signal such that the current value of the primary signal and a value including information regarding one or a plurality of past values of the primary signal are used to derive a current value corrected according to a predetermined relational expression. The secondary signal is output as a flow rate signal during a stable flow rate period, and the secondary signal is not output as a flow rate signal during a transient change period.
Public/Granted literature
- US20180314271A1 FLOW RATE SIGNAL CORRECTION METHOD AND FLOW RATE CONTROL DEVICE EMPLOYING SAME Public/Granted day:2018-11-01
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