Invention Grant
- Patent Title: Dynamic random access memory array, semiconductor layout structure and fabrication method thereof
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Application No.: US16878481Application Date: 2020-05-19
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Publication No.: US10885956B2Publication Date: 2021-01-05
- Inventor: Chih Cheng Liu
- Applicant: Changxin Memory Technologies, Inc.
- Applicant Address: CN Anhui
- Assignee: Changxin Memory Technologies, Inc.
- Current Assignee: Changxin Memory Technologies, Inc.
- Current Assignee Address: CN Anhui
- Agency: Sheppard Mullin Richter & Hampton LLP
- Priority: CN201711227178 20171129
- Main IPC: G11C7/12
- IPC: G11C7/12 ; G11C8/14 ; H01L27/108

Abstract:
A semiconductor layout structure for a dynamic random access memory (DRAM) array, comprising an isolation structure and a plurality of active areas situated in a semiconductor substrate, each of the active areas extending along a length-wise central axis. The isolation structure is situated among the active areas. The active areas are arranged in an array and comprise a plurality of first active areas and a plurality of second active areas. The first active areas are arranged along a first length-wise direction of the active areas. The second active areas are arranged along a second length-wise direction of the active areas. The first active areas are parallel and adjacent to the second active areas, and the first and second active areas are alternately distributed in a direction of word-lines. The first active area having a first width smaller than a second width of the second active area.
Public/Granted literature
- US20200279594A1 DYNAMIC RANDOM ACCESS MEMORY ARRAY, SEMICONDUCTOR LAYOUT STRUCTURE AND FABRICATION METHOD THEREOF Public/Granted day:2020-09-03
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