Invention Grant
- Patent Title: Power feed structure and plasma processing apparatus
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Application No.: US16713972Application Date: 2019-12-13
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Publication No.: US10886108B2Publication Date: 2021-01-05
- Inventor: Yasuharu Sasaki , Yohei Uchida
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2018-234681 20181214
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A power feed structure includes a first connecting member group and a ring-shaped first terminal member. The first connecting member group includes a plurality of first connecting members arranged along a circumferential direction of a focus ring disposed in a processing chamber of a plasma processing apparatus to apply a bias potential to the focus ring. The ring-shaped first terminal member is electrically connected to the first connecting members.
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