Invention Grant
- Patent Title: Sputtering gap measurement apparatus and magnetron sputtering device
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Application No.: US15756980Application Date: 2017-08-10
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Publication No.: US10886114B2Publication Date: 2021-01-05
- Inventor: Yingnan Kang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Applicant Address: CN Beijing; CN Inner Mongolia
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee Address: CN Beijing; CN Inner Mongolia
- Agency: Kinney & Lange, P.A.
- Priority: CN201720004344U 20170103
- International Application: PCT/CN2017/096726 WO 20170810
- International Announcement: WO2018/126685 WO 20180712
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; G01B5/14 ; H01J37/32

Abstract:
A magnetron sputtering device in one embodiment of the present disclosure includes a support table supporting thereon a base substrate, and a floating mask arranged at a first side of the support table and substantially parallel to the support table. The sputtering gap measurement apparatus includes: a horizontal testing platform arranged on the support table during the measurement, a first edge of the horizontal testing platform being flush with an edge of the first side of the support table in the case that the horizontal testing platform is located at a first position; a first movement mechanism configured to control the horizontal testing platform to move in a direction close to the floating mask, the horizontal testing platform being in contact with the floating mask in the case that the horizontal testing platform has moved to a second position; and a distance measurement mechanism configured to measure a movement distance of the horizontal testing platform from the first position to the second position.
Public/Granted literature
- US20190057850A1 SPUTTERING GAP MEASUREMENT APPARATUS AND MAGNETRON SPUTTERING DEVICE Public/Granted day:2019-02-21
Information query
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