Invention Grant
- Patent Title: Display device manufacturing method and display device manufacturing apparatus
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Application No.: US16095377Application Date: 2018-08-16
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Publication No.: US10886131B2Publication Date: 2021-01-05
- Inventor: Ming-jen Lu
- Applicant: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Current Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Current Assignee Address: CN Wuhan
- Priority: CN201810670832 20180626
- International Application: PCT/CN2018/100732 WO 20180816
- International Announcement: WO2020/000597 WO 20200102
- Main IPC: H01L21/225
- IPC: H01L21/225 ; H01L21/30 ; H01L21/67
Abstract:
A display device manufacturing method and a display device manufacturing apparatus are provided. The method includes steps A to D. The step A includes forming a display device. The step B includes disposing the display device in a sealing chamber. The step C includes adding hydrogen gas into the sealing chamber such that hydrogen atoms in the hydrogen gas spread in an insulating layer. The step D includes heating the hydrogen gas and/or the display device in sealing chamber such that the hydrogen atoms in insulating layer spread in the semiconductor member. The present invention can enhance electrical performance of the semiconductor member.
Public/Granted literature
- US20200058507A1 DISPLAY DEVICE MANUFACTURING METHOD AND DISPLAY DEVICE MANUFACTURING APPARATUS Public/Granted day:2020-02-20
Information query
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