Invention Grant
- Patent Title: Method for doping layer, thin film transistor and method for fabricating the same
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Application No.: US16337959Application Date: 2018-05-18
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Publication No.: US10886144B2Publication Date: 2021-01-05
- Inventor: Xuewei Wang
- Applicant: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD. , BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Inner Mongolia; CN Beijing
- Assignee: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Inner Mongolia; CN Beijing
- Agency: Calfee, Halter & Griswold LLP
- Priority: CN201710357418 20170519
- International Application: PCT/CN2018/087484 WO 20180518
- International Announcement: WO2018/210335 WO 20181122
- Main IPC: H01L21/426
- IPC: H01L21/426 ; H01L21/02 ; H01L21/8234 ; H01L21/04 ; H01L21/425

Abstract:
A method for doping a layer, a thin film transistor and a method for fabricating the thin film transistor. The method comprises: forming a layer to be doped on a substrate by a first patterning process, wherein the layer comprises a first region, a second region and a third region, the first region is arranged in a middle region, the third region is arranged in an edge region, the second region is arranged between the first region and the third region; forming a first blocking layer and a second blocking layer on the layer in this order by a second patterning process, wherein an orthographic projection region of the first blocking layer on the layer exactly covers the first region, and an orthographic projection region of the second blocking layer on the layer exactly covers the first region and the second region; perform a first doping on the layer with an ion beam perpendicular to the substrate, to realize doping of the third region; rotating the substrate by a preset angle in a direction parallel to the ion beam, so that the second blocking layer does not shield the second region, and performing a second doping on the layer with the ion beam.
Public/Granted literature
- US20200027720A1 METHOD FOR DOPING LAYER, THIN FILM TRANSISTOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2020-01-23
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