Invention Grant
- Patent Title: Positioning apparatus
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Application No.: US16136976Application Date: 2018-09-20
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Publication No.: US10886150B2Publication Date: 2021-01-05
- Inventor: Martin Reuter
- Applicant: Marco Systemanalyse und Entwicklung GmbH
- Applicant Address: DE Dachau
- Assignee: Marco Systemanalyse und Entwicklung GmbH
- Current Assignee: Marco Systemanalyse und Entwicklung GmbH
- Current Assignee Address: DE Dachau
- Agency: Dickinson Wright PLLC
- Priority: DE102017009542 20171013
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B23Q1/34 ; H01L41/08 ; H01L41/09 ; B25J15/00 ; H02N2/02 ; F16M13/00 ; H02N2/00
Abstract:
A positioning apparatus comprises a base element provided for fastening to a robot, a base movably supported at the base element, and a piezoactuator by which the base is movable in a direction relative to the base element. A second piezoactuator is provided by which a counterweight is simultaneously movable in an opposite direction.
Public/Granted literature
- US20190115229A1 POSITIONING APPARATUS Public/Granted day:2019-04-18
Information query
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