Invention Grant
- Patent Title: Test condition determining apparatus and test condition determining method
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Application No.: US16168354Application Date: 2018-10-23
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Publication No.: US10886184B2Publication Date: 2021-01-05
- Inventor: Takuyo Nakamura , Masashi Sakai
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2018-003978 20180115
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G01R31/28 ; H01L21/67 ; H01L23/544

Abstract:
The object is to provide a technique for enabling determination of an appropriate test condition. A test condition determining apparatus includes a map generating unit, a withstand voltage estimating unit, and a test condition determining unit. The map generating unit generates a wafer map relevant to a plurality of chips, based on measurement values of thicknesses and carrier concentrations of an epitaxial growth layer, and measurement results of crystal defects in the epitaxial growth layer and a substrate. The withstand voltage estimating unit estimates a withstand voltage of each of the chips based on the wafer map. The test condition determining unit determines a test condition of a test to be conducted on the chips, based on a result of the estimation made by the withstand voltage estimating unit.
Public/Granted literature
- US20190221485A1 TEST CONDITION DETERMINING APPARATUS AND TEST CONDITION DETERMINING METHOD Public/Granted day:2019-07-18
Information query
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