Invention Grant
- Patent Title: Interconnect structure and related methods
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Application No.: US16521127Application Date: 2019-07-24
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Publication No.: US10886215B2Publication Date: 2021-01-05
- Inventor: Houman Zahedmanesh , Victoria L. Calero Diaz Del Castillo , Christian Witt
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP18197400 20180928
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/522 ; H01L21/768 ; H01L23/528 ; H01L23/532

Abstract:
Example embodiments relate to interconnect structures and related methods. One embodiment includes an interconnect structure. The interconnect structure includes a first interconnection level including a first dielectric layer and a first set of conductive paths. The interconnect structure also includes a second interconnection level arranged above the first interconnection level and including a second dielectric layer and a second set of conductive paths. Further, the interconnect structure includes a third interconnection level arranged above the second interconnection level and including a third dielectric layer and a third set of conductive paths. In addition, the interconnect structure includes a fourth interconnection level arranged above the third interconnection level and including a fourth dielectric layer and a fourth set of conductive paths. Still further, the interconnect structure includes a first multi-level via structure and a second multi-level via structure.
Public/Granted literature
- US1681460A Recording device Public/Granted day:1928-08-21
Information query
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