Invention Grant
- Patent Title: Electric fuse structure for optimizing programming current window of the electric fuse structure and manufacturing method
-
Application No.: US16192820Application Date: 2018-11-16
-
Publication No.: US10886216B2Publication Date: 2021-01-05
- Inventor: Yanwei Zhang , Runling Li , Tianpeng Guan
- Applicant: Shanghai Huali Integrated Circuit Mfg. Co., Ltd.
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huali Integrated Circuit Mfg. Co., Ltd.
- Current Assignee: Shanghai Huali Integrated Circuit Mfg. Co., Ltd.
- Current Assignee Address: CN Shanghai
- Agency: Kilpatrick Townsend & Stockton, LLP
- Priority: CN201810842465 20180727
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L23/52 ; H01L23/525 ; H01L21/265 ; H01L21/762 ; H01L21/8238

Abstract:
The present disclosure provides an electric fuse structure and a manufacturing method therefor, the manufacturing method including providing a substrate, forming a polysilicon corresponding to the electric fuse structure on the substrate, performing a source-drain ion implantation of a first doping type on the polysilicon, performing a source-drain ion implantation of a second doping type on the polysilicon, the first doping type being different from the second doping type, and forming a metal salicide on the surface of the doped polysilicon. The electric fuse structure manufactured according to the manufacturing method provided in the present disclosure has a high post-value resistance, so that a programming current window is effectively optimized, and the manufactured electric fuse structure has a uniform internal interface and good electrical characteristics.
Public/Granted literature
- US20200035600A1 ELECTRIC FUSE STRUCTURE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2020-01-30
Information query
IPC分类: