Invention Grant
- Patent Title: Laser bonding apparatus, method of bonding semiconductor devices, and method of manufacturing semiconductor package
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Application No.: US16244345Application Date: 2019-01-10
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Publication No.: US10886248B2Publication Date: 2021-01-05
- Inventor: Jun-su Lim , Satoshi Inada
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2018-0003449 20180110
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/268 ; B23K26/03 ; B23K26/20 ; H01L21/18

Abstract:
A laser bonding apparatus, a method of bonding a plurality of semiconductor devices arranged on a main substrate of a workpiece, to the main substrate, and a method of manufacturing a semiconductor package, the laser bonding apparatus including a chamber having a transmissive window and in which a workpiece is accommodatable; a gas supply conduit connected to the chamber and configured to supply a gas at an elevated pressure relative to a pressure outside of the chamber; and a laser generator arranged outside the chamber and configured to irradiate the workpiece accommodated in the chamber, through the transmissive window.
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Information query
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