Invention Grant
- Patent Title: Memory circuitry and methods of forming memory circuitry
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Application No.: US16212981Application Date: 2018-12-07
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Publication No.: US10886285B2Publication Date: 2021-01-05
- Inventor: Werner Juengling
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/308
- IPC: H01L21/308 ; H01L27/11509 ; H01L21/768

Abstract:
A method of forming memory circuitry comprises using a digitline mask to form both: (a) conductive digitlines in a memory array area, and (b) lower portions of conductive vias in a peripheral circuitry area laterally of the memory array area. The lower portions of the vias electrically couple with circuitry below the vias and the digitlines. Pairs of conductive wordlines are formed above the digitlines in the memory array area. The pairs of wordlines extend from the memory array area into the peripheral circuitry area. Individual of the pairs are directly above individual of the lower portions of individual of the vias. Individual upper portions of the individual vias are formed. The individual upper portions both: (c) directly electrically couple to one of the individual lower portions of the individual vias, and (d) directly electrically couple together the wordlines of the individual pair of wordlines that are directly above the respective one individual lower portion of the respective individual via. Other methods, and structure independent of method of fabrication, are disclosed.
Public/Granted literature
- US20200185396A1 Memory Circuitry And Methods Of Forming Memory Circuitry Public/Granted day:2020-06-11
Information query
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