Invention Grant
- Patent Title: Joint opening structures of three-dimensional memory devices and methods for forming the same
-
Application No.: US16046847Application Date: 2018-07-26
-
Publication No.: US10886291B2Publication Date: 2021-01-05
- Inventor: Zhenyu Lu , Wenguang Shi , Guanping Wu , Feng Pan , Xianjin Wan , Baoyou Chen
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Hubei
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: CN201710134782 20170308,CN201710134783 20170308
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/11578 ; H01L27/1157 ; H01L27/11582 ; H01L27/11565

Abstract:
Joint opening structures of 3D memory devices and fabricating method are provided. A joint opening structure comprises a first through hole penetrating a first stacked layer and a first insulating connection layer, a first channel structure at the bottom of the first through hole, a first functional layer on the sidewall of the first through hole, a second channel structure on the sidewall of the first functional layer, a third channel structure over the first through hole, a second stacked layer on the third channel structure, a second insulating connection layer on the second stacked layer, a second through hole penetrating the second stacked layer and the second insulating connection layer, a second functional layer disposed on the sidewall of the second through hole, a fourth channel structure on the sidewall of the second functional layer, and a fifth channel structure over the second through hole.
Public/Granted literature
- US20190081060A1 JOINT OPENNING STRUCTURES OF THREE-DIMENSIONAL MEMORY DEVICES AND METHODS FOR FORMING THE SAME Public/Granted day:2019-03-14
Information query
IPC分类: